세미나

Geometrically Designed 3D Nanostructure for High Performance MEMS Devices
Min-Ho Seo
School of Biomedical Convergence Engineering, Pusan National University, Republic of Korea
Recently, MEMS (micro-electromechanical systems), appropriate to demonstrate high performance sensors and
actuators, has gain great interests in academia and industry, because it can be a key technology for next generation
applications, such as smart healthcare, robotics, and green energy systems. Here, the high-performance MEMS
sensors and actuators exploiting 3-D structured nanomaterials are introduced. Basically, the appropriate 3-D
structure design of the nanomaterials, in terms of mechanical, chemical, and electrical, for the high-performance
MEMS devices are introduced, and then, the fabrication process to demonstrate the optimized 3-D nanostructures
and associated devices are explained. Finally, we show the drastically performance-enhanced flexible pressure
sensor, long-term durable and fast hydrogen gas sensor, and bio-implantable thermal stimulator based on the
optimized 3D nanostructure.