커뮤니티

세미나

High-aspect-ratio silicon pillar arrays micro-column integrated micro gas chromatography for detecting VVOC mixtures

Date
2024-09-25 16:00:00
Lecturer
Prof. Jung Hwan Seo
Venue
110-N105
Contact
Prof. Heungjoo Shin (hjshin@unist.ac.kr)

Gas chromatography (GC) is a reliable technique for analyzing complex gas mixtures, and the growing demand for sensitive, accurate, and portable tools has driven the development of micro gas chromatography (μGC).

These compact systems, enabled by advances in microfabrication, materials science, and detector technology, are widely applied in fields such as environmental monitoring, food analysis, and forensics.

A key component in μ-GC is the micro separation column, which plays a crucial role in the mixture separation process and significantly impacts system performance.

This study presents an innovative approach by introducing highaspect-ratio (HAR) micropillar arrays, known as black silicon, to enhance separation efficiency.

Using black silicon-based micro rods created during the Deep Reactive Ion Etching (Deep RIE) process, the HAR μpillar column provides a larger interactive surface area, leading to stronger analyte-stationary phase interactions.

This design improves resolution by at least 51% and enhances peak identification compared to traditional rectangular columns.